JPH0151413B2 - - Google Patents

Info

Publication number
JPH0151413B2
JPH0151413B2 JP60132650A JP13265085A JPH0151413B2 JP H0151413 B2 JPH0151413 B2 JP H0151413B2 JP 60132650 A JP60132650 A JP 60132650A JP 13265085 A JP13265085 A JP 13265085A JP H0151413 B2 JPH0151413 B2 JP H0151413B2
Authority
JP
Japan
Prior art keywords
plate
pressure
shaped body
fluid
pressure fluid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP60132650A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62105831A (ja
Inventor
Hiroshi Akashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to JP13265085A priority Critical patent/JPS62105831A/ja
Publication of JPS62105831A publication Critical patent/JPS62105831A/ja
Priority to US07/343,344 priority patent/US5067762A/en
Publication of JPH0151413B2 publication Critical patent/JPH0151413B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Sheets, Magazines, And Separation Thereof (AREA)
  • Manipulator (AREA)
  • Load-Engaging Elements For Cranes (AREA)
JP13265085A 1985-06-18 1985-06-18 空気保持装置 Granted JPS62105831A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP13265085A JPS62105831A (ja) 1985-06-18 1985-06-18 空気保持装置
US07/343,344 US5067762A (en) 1985-06-18 1989-04-26 Non-contact conveying device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13265085A JPS62105831A (ja) 1985-06-18 1985-06-18 空気保持装置

Publications (2)

Publication Number Publication Date
JPS62105831A JPS62105831A (ja) 1987-05-16
JPH0151413B2 true JPH0151413B2 (en]) 1989-11-02

Family

ID=15086279

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13265085A Granted JPS62105831A (ja) 1985-06-18 1985-06-18 空気保持装置

Country Status (1)

Country Link
JP (1) JPS62105831A (en])

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH081740B2 (ja) * 1987-10-02 1996-01-10 株式会社日立製作所 低発塵円板組込ハンド
JP2539662B2 (ja) * 1988-04-26 1996-10-02 博 明石 シ―ト送り出し装置
US4969676A (en) * 1989-06-23 1990-11-13 At&T Bell Laboratories Air pressure pick-up tool
JPH0342522U (en]) * 1989-08-31 1991-04-22

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5329550A (en) * 1976-08-30 1978-03-18 Nissin Electric Co Ltd Protective device for ddc power system

Also Published As

Publication number Publication date
JPS62105831A (ja) 1987-05-16

Similar Documents

Publication Publication Date Title
US5067762A (en) Non-contact conveying device
EP0201240B1 (en) Apparatus for supporting and/or conveying a plate with fluid without physical contact
US4474397A (en) Pick-up head utilizing aspirated air flow
JP4669252B2 (ja) 旋回流形成体および非接触搬送装置
US4257637A (en) Contactless air film lifting device
US4395165A (en) Chip shuttle track
JPH10181879A (ja) 搬送装置
CN115315796A (zh) 搬送装置
JP3445138B2 (ja) 無接触搬送装置
JPH0151413B2 (en])
JPH0632916B2 (ja) 流体によつて板状体を無接触状態で懸垂浮遊搬送させる方法
JP3994372B2 (ja) 空気保持装置
US6647791B1 (en) Device for contactlessly gripping and positioning components
JP2020161636A (ja) ウエハ搬送装置
JP2002280439A (ja) 搬送装置
JPH0512113B2 (en])
JPH05335404A (ja) 無接触保持装置
JP4333879B2 (ja) 非接触吸着治具及び非接触チャック装置
JPS62211236A (ja) 板状体の保持装置
JPH0640560A (ja) 無接触保持装置
JPH06321351A (ja) 無接触ピックアップ装置
CN114175225B (zh) 负载锁定装置
JPH02305740A (ja) 基板搬送装置
JPH01127538A (ja) 板状物受け渡し装置
JPS61111251A (ja) 平板状部材の保持装置

Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees